Mix
Pure
Items | Purity | Package | 充装量 | 适用工艺 | |
---|---|---|---|---|---|
Cylinder | Valve | ||||
Excimer Laser | 1.25% Kr 3.5%Ar/10ppmXe |
47L | JISS22R, CGA580, CGA679 | 135kg/cm2 | Photo 工艺 |
1% F₂ / 1.25% Kr 1% F₂ / 3.5% Ar |
135kg/cm2 | Photo工艺 | |||
PH₃ Mix | 20ppm ~ 50% PH₃ Mixture | 47L | CGA350 | 100 ~ 120kg/cm2 | Dopant工艺 |
Inert Mix | 3% H₂ & 1.2% He Mixture | 47L | DISS724, JISS22R | 110 ~ 120kg/cm2 | Photo工艺 |
SiH₄ Mix | 10ppm ~ 50% SiH₄ Mixture | 47L | JISS22L, CGA350 | 100 ~ 120kg/cm2 | LED 沉积工艺 |
Si₂H₆ Mix | 100ppm ~ 50% Si₂H₆ Mixture | 47L | CGA350 | 120kg/cm2 | LED沉积工艺 |
F₂ Mix | 1% ~ 20% F₂ Mixture | 47L | CGA679 | 110 ~ 120kg/cm2 | 清洁工艺 |
AsH₃ Mix | 15% AsH₃ Mixture | - | CGA350 | 400psi | Dopant 工艺 |
GeH4 Mix | 10% GeH4 Mixture | 47L | DISS632 | 1800psi | 沉积工艺 |