Mix
Pure
| 품목 | Purity | Package | 충전량 | 적용공정 | |
|---|---|---|---|---|---|
| Cylinder | Valve | ||||
| NO | 3N5, 4N (99.95%, 99.99%) | 47L | JISS22R | 490psi, 290psi | 증착공정 |
| CF₄ | 5N (99.999%) | 47L, 440L | DISS716, JISS22R | 30kg, 32kg, 300kg | 세정 및 식각공정 |
| HBr | 5N, 5N5 (99.999%, 99.9995%) | 47L | CGA330, DISS634 | 50kg, 55kg | 식각공정 |
| Si₂H₆ | 4N8 (99.998%) | 47L | JISS22L, DISS632 | 5kg, 10kg, 20kg | 증착공정 |
| C3F8 | 5N (99.999%) | 47L | JISS22R | 40kg | 세정 및 식각공정 |
| He | 5N, 6N (99.999%, 99.9999%) | 47L, Bundle | CGA 580, JISS22R | 130Bar, 170Bar | Carrier 및 Purge 공정 |
