Mix
Pure
| 품목 | Purity | Package | 충전량 | 적용공정 | |
|---|---|---|---|---|---|
| Cylinder | Valve | ||||
| Excimer Laser | 1.25% Kr 3.5%Ar/10ppmXe |
47L | JISS22R, CGA580, CGA679 | 135kg/cm2 | Photo 공정 |
| 1% F₂ / 1.25% Kr 1% F₂ / 3.5% Ar |
135kg/cm2 | Photo공정 | |||
| PH₃ Mix | 20ppm ~ 50% PH₃ Mixture | 47L | CGA350 | 100 ~ 120kg/cm2 | Dopant 공정 |
| Inert Mix | 3% H₂ & 1.2% He Mixture | 47L | DISS724, JISS22R | 110 ~ 120kg/cm2 | Photo 공정외 |
| SiH₄ Mix | 10ppm ~ 50% SiH₄ Mixture | 47L | JISS22L, CGA350 | 100 ~ 120kg/cm2 | LED 증착공정 |
| Si₂H₆ Mix | 100ppm ~ 50% Si₂H₆ Mixture | 47L | CGA350 | 120kg/cm2 | LED 증착공정 |
| F₂ Mix | 1% ~ 20% F₂ Mixture | 47L | CGA679 | 110 ~ 120kg/cm2 | 세정공정 |
| AsH₃ Mix | 15% AsH₃ Mixture | - | CGA350 | 400psi | Dopant공정 |
| GeH4 Mix | 10% GeH4 Mixture | 47L | DISS632 | 1800psi | 증착공정 |
