Product

Mix Gas

품목 Purity Package 충전량 적용공정
Cylinder Valve
Excimer Laser 1.25% Kr
3.5%Ar/10ppmXe
47L JISS22R, CGA580, CGA679 135kg/cm2 Photo 공정
1% F₂ / 1.25% Kr
1% F₂ / 3.5% Ar
135kg/cm2 Photo공정
PH₃ Mix 20ppm ~ 50% PH₃ Mixture 47L CGA350 100 ~ 120kg/cm2 Dopant 공정
Inert Mix 3% H₂ & 1.2% He Mixture 47L DISS724, JISS22R 110 ~ 120kg/cm2 Photo 공정외
SiH₄ Mix 10ppm ~ 50% SiH₄ Mixture 47L JISS22L, CGA350 100 ~ 120kg/cm2 LED 증착공정
Si₂H₆ Mix 100ppm ~ 50% Si₂H₆ Mixture 47L CGA350 120kg/cm2 LED 증착공정
F₂ Mix 1% ~ 20% F₂ Mixture 47L CGA679 110 ~ 120kg/cm2 세정공정
AsH₃ Mix 15% AsH₃ Mixture - CGA350 400psi Dopant공정
GeH4 Mix 10% GeH4 Mixture 47L DISS632 1800psi 증착공정

담당자 .오동규 차장 (영업팀)

TEL : 043-713-1521 / E mail : dgoh@hansol.com

담당자 .박형열 과장 (영업팀)

TEL : 043-713-1523 / E mail : hypark@hansol.com